DOI:10.5488/CMP.16.33803 arXiv:1310.1235
Title:
Numerical analysis of the morphological and phase changes in the TiN/Al2O3 coating under high current electron beam modification
Author(s):
| A.D. Pogrebnjak (Sumy State University, 2 Rimskii-Korsakov St., 40007 Sumy, Ukraine) , | |
| V.N. Borisyuk (Sumy State University, 2 Rimskii-Korsakov St., 40007 Sumy, Ukraine) , | |
| A.A. Bagdasaryan (Sumy State University, 2 Rimskii-Korsakov St., 40007 Sumy, Ukraine) |
The modification of the surface structure of the hybrid coating TiN/Al2O3 with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with the increase of the beam energy, the surface become more regular and uniform.
Key words:
self-similarity, fractal dimension, hybrid coating, high-current electron beam(s) effect
PACS:
81.40.- z, 81.07.- b, 68.35.-p, 61.46.-w, 05.45.Df, 61.43.Hv
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